|
Full scale range |
0~5,10,20,30,50,100,200,300,500SCCM 0~1,2,3,5,10,20,30 SLM |
|
Accuracy |
±1% F.S. (20,30SLM: ±2 % F.S.) |
|
Linearity |
±0.5 % F.S. (20,30SLM: ±2% F.S.) |
|
Repeatability |
±0.2 % F.S. |
|
Response Time |
≤ 4 sec |
|
Differential Pressure |
≤10SLM:(0.1~ 0.5)MPa(14.5~72.5 psid) >10SLM:(0.1~0.3) MPa(14.5~43.5 psid) |
|
Max Pressure |
3 MPa (435.1 psig) |
|
Operation Temperature |
5 ºC ~ 45 ºC |
|
Valve Type |
N.C.Solenoid |
|
Input/Output Signa |
4~20 mA or 1~5VDC |
|
Power Supply |
24 VDC 400 mA |
|
Weight |
1.2 kg |