Mass Flow Controller - MFC

Full scale range

0~20,30,50,100,150,200,250 SLM

Accuracy

±1.5 % F.S.

Linearity

±1% F.S.

Repeatability

±0.2 % F.S.

Response Time

≤ 3 sec

Differential Pressure

20,30 SLM: 0.05~0.30 MPa (7.3~43.5 psid) 50~150SLM: 0.10~0.30 MPa (14.5~43.5 psid) 200,250SLM: 0.15~0.30 MPa (21.8~43.5 psid)

Max Pressure

3 MPa (435.1 psig)

Operation Temperature

5 ºC ~ 45 ºC

Valve Type

N.C.Solenoid

Input/Output Signa

4~20 mA or 1~5VDC

Power Supply

24 VDC 400 mA

Weight

2.6 kg