Mass Flow Controller - MFC

Full scale range

( 0~20,30,50,100,150,200,250) SLM

Accuracy

±1.5 % F.S

Linearity

±1 % F.S

Repeatability

±0.2 % F.S

Response Time

(1 ~ 3) sec

Differential Pressure

20 , 30 SLM: (0.05 ~ 0.30) MPa 7.343.5 psid 50,150 SLM: (0.10 ~ 0.30) MPa 14.543.5 psid 200,250 SLM: (0.15 ~ 0.30) MPa 21.843.5 psid

Max Pressure

3 MPa 435.1 psig

Operation Temperature

5 ºC ~ 45 ºC

Valve Type

N.C.Solenoid

Input/Output Signa

0 V ~ +5.00 V (Input Resistance > 100K, Output Electric Current ≤3mA)

Power Supply

+15 V 50 mA -15V 400 mA

Weight

2.6 kg