|
Full scale range |
( 0~5,10,20,30,50,100,200,300,500) SCCM ( 0~1,2,3,5,10,20) SLM |
|
Accuracy |
±1 % F.S. (20SLM: ±2 % F.S.) |
|
Linearity |
±0.5 % F.S. (20SLM: ±2 % F.S.) |
|
Repeatability |
±0.2 % F.S. |
|
Response Time |
≤1.5 sec |
|
Differential Pressure |
≤10SLM： 0.1 ~ 0.5 MPa ＞10SLM： 0.1~ 0.3 MPa |
|
Max Pressure |
3 MPa |
|
Operation Temperature |
Zero: ≤±0.05% F.S./℃; Span: ≤±0.1% F.S./℃; |
|
Valve Type |
Viton,Teflon,Neoprene |
|
Input/Output Signa |
0 V ~ +5.00 V |
|
Power Supply |
+15 V 50 mA -15V 200 mA |
|
Weight |
1.2 kg |