|
Full scale range |
( 0~5,10,20,30,50,100,200,300,500) SCCM ( 0~1,2,3,5,10,20,30) SLM |
|
Accuracy |
±1 % F.S. (20,30SLM: ±2 % F.S. ) |
|
Linearity |
±0.5 % F.S. (20,30SLM: ±2 % F.S. ) |
|
Repeatability |
±0.2 % F.S. |
|
Response Time |
≤ 2 sec |
|
Differential Pressure |
≤10SLM： 0.1 ~ 0.5 MPa (14.5~72.5 psid) ＞10SLM： 0.1~ 0.3 MPa (14.5~43.5 psid) |
|
Max Pressure |
3 MPa (435.1 psig) |
|
Operation Temperature |
5 ℃ ~ 45 ℃ |
|
Valve Type |
N.C. Solenoid |
|
Input/Output Signa |
0 V ~ +5.00 V (Input Resistance > 100K, Output Electric Current ≤3mA) |
|
Power Supply |
+15 V 50 mA -15V 200 mA |
|
Weight |
0.95kg |