|
Full scale range |
( 0~5,10,20,30,50,100,200,300,500) SCCM ( 0~1,2,3,5,10,20,30) SLM |
|
Accuracy |
±1 % F.S (20,30SLM: ±2 % F.S) |
|
Linearity |
±0.5 % F.S (20,30SLM: ±2 % F.S) |
|
Repeatability |
±0.2 %F.S |
|
Response Time |
Electronic Characteristic: ≤ 10 sec Gas Characteristic: ≤ 4 sec |
|
Differential Pressure |
≤10SLM (0.2 ~ 0.8) MPa ＞10SLM (0.2 ~ 0.6) MPa |
|
Max Pressure |
10 MPa |
|
Operation Temperature |
5 ℃ ~ 45 ℃ |
|
Valve Type |
N.C. Solenoid |
|
Input/Output Signa |
0 V ~ +5.00 V (Input Resistance＞100K, Output Electric Current ≤3mA) |
|
Power Supply |
+15 V 50 mA; -15V 200 mA |
|
Weight |
1.2 kg |