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D07 Series Analog Thermal MFM and MFC for Gases |
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D07-11C MFC FS: 0~500 sccm & 0-30 slpm Accuracy: 1% FS up to 10 slpm I/O: 0-5 V Pressure rating: 100 bar Operating temp.: 5 - 45 C |
D07-19C MFC FS: 0~500 sccm & 0-20 slpm Accuracy: 1% FS up to 10 slpm I/O: 0-5 V Pressure rating: 30 bar Operating temp.: 5 - 45 C |
D07-19B MFC FS: 0~500 sccm & 0-30 slpm Accuracy: 1% FS up to 10 slpm I/O: 0-5 V Pressure rating: 30 bar Operating temp.: 5 - 45 C |
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D07-23F MFC FS: 0-250 slpm Accuracy: 1.5% FS I/O: 4-20 mA Pressure rating: 30 bar Operating temp.: 5 - 45 C |
D07-23A MFC FS: 0-250 slpm Accuracy: 1.5% FS I/O: 0-5 V Pressure rating: 30 bar Operating temp.: 5 - 45 C |
D07-19F MFC FS: 0~500 sccm & 0-30 slpm Accuracy: 1% FS up to 10 slpm I/O: 4-20 mA Pressure rating: 30 bar Operating temp.: 5 - 45 C |
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